Robotic Fine Positioner Performance Specifications

   Mass ................................................. 2.7 Kg
   Size ................................ 102 mm x 130 mm x 60 mm
   Nominal air pressure.................................. 50 psi
   Maximum travel ..................................+/- 1.000 mm
   Maximum angle ...................................+/- 1.75 deg
   Command resolution ............................. 0.03 microns
   Motion resolution (3 sigma) .................... 0.2  microns
   Repeatability (3 sigma) ........................ 0.2  microns
   Uncalibrated accuracy .................................... 1%
   Maximum x or y force ................................. 57.0 N
   Peak acceleration .................................... 12 g's
   Bandwidth ............................................. 50 Hz